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ICP Plasma System
The AXIC IsoLok® Inductively Coupled Plasma (ICP) Load-Locked Processing System from AXIC, Inc. defines a new concept in Deep Reactive Ion Etch (DRIE) and low temperature-low damage Plasma Enhanced Chemical Vapor Deposition (ICP-PECVD) plasma processing. The system is based on a modular design starting with a universal chamber and cabinet unit with ICP etch or deposition bottom electrodes available for easy installation into the chamber unit combined with a load-lock. We are confident you will find the ease of use, variety of plasma processes, serviceability and attractive pricing unsurpassed by any other plasma product in the market.
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Matrix Vapor Deposition System
iMLayer
The iMLayer matrix vapor deposition system is sample pretreatment (application of matrix) in order to perform MALDI-MS imaging using an analysis system such as the iMScope imaging mass microscope or the MALDI-7090. With the iMLayer, the deposition method has been adopted as a pretreatment method to achieve high spatial resolution. By using this method, fine matrix crystal can be produced. Also, thanks to automated control, the coating thickness is reproducibly controlled as users configure.
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Metal-Organic Compound Chemical Vapor Deposition
Model MOCVD-500-A
For Experimental growth of quality epitaxial layers III-V, II-VI compounds. Multi-Layer structures. Directly heated silicon carbide coated, high purity graphite or PBN susceptor. Low mass thermocouple probe immersed into susceptor. Broad temperature and pressure application. Highest quality materials utilized throughout.
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Ozone Gas Delivery Systems
MKS ozone gas delivery systems provide field-proven, high concentration, ultra-clean ozone generation for advanced thin film applications such as Atomic Layer Deposition (ALD), Chemical Vapor Deposition (CVD), Tetraethyl Orthosilicate (TEOS)/Ozone CVD (HDSACVD), contaminant removal and oxide growth. Gas delivery models have integrated ozone concentration monitoring, flow control, and power distribution. Additional system options include safety monitoring, status indicators and ozone destruction capability.
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Liquid Flow Controller
Built upon field proven technology, the Turbo™ Liquid Flow Controller (LFC) 2950 was engineered to pair with MSP Turbo II™ Vaporizers to provide a reliable, high-performance liquid vapor delivery solution for semiconductor thin film deposition processes (including CVD, PECVD, ALD, and MOCVD). The diagram below shows how the LFC fits into the liquid vaporization system MSP offers.
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Physical Vapor Deposition Systems
Physical Vapor Deposition Systems offer maximum flexibility for a wide range of thin film deposition applications with advanced process capabilities, unsurpassed uniformity and multiple deposition modes.
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Vapor Concentration Monitor
IR-300 Series
Metal-Organic Chemical Vapor Deposition (MOCVD) is widely used in the manufacture of LEDs, optical devices and other components. Liquid and solid precursors are delivered to the reaction chamber by controlling the temperature, pressure and the carrier gas flow rate (bubbling method). Process results can be affected by changes especially in temperature and liquid level. The in-line IR-300 Series measures and reports the precursor concentration in real time.
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Ozone Gas Generators
SEMOZON® Ozone gas generators and subsystems are the industry standard for compact, high concentration, ultra-clean ozone gas generation. Applications include Atomic Layer Deposition (ALD), Atomic Layer Etch (ALE), Chemical Vapor Deposition (CVD) and Wet Cleaning.
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GHW Series 13.56 MHz, 1.25, 2.5, And 5.0 KW High-Reliability RF Plasma Generators
The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield. They are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
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Plasma CVD & Reactive Ion Etching System
MODEL DRIE-1100-LL-ECR
The Tek-Vac DRIE-1100-LL-ECR series systems are designed for both high-density plasma chemical vapor deposition and reactive ion etching of sub-micron integrated circuits, optical devices and RF microwave electron devices.
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Thin-film deposition
Plasma Source
SPECS Surface Nano Analysis GmbH
Thin-film deposition covers any technique for depositing material onto a bulk or thin film substrate. Elemental alloy or compound films are produced by non-reactive or reactive (co-)deposition. Often functionalization or tailoring of device interfaces by predeposition or deposition assisting surface treatment with atoms or ions is necessary.
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Particle Deposition Systems
MSP’s 2300G3 Particle Deposition System sets the standards for wafer inspection and metrology equipment. This advanced tool is vital for increasing the yield of future leading-edge devices, while meeting the measurement needs of today.
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Water Vapor Permeability Tester
WPT-304
WPT-304 Water Vapor Permeability Tester is manufactured based on the gravimetric method and is applicable to test the water vapor transmission rate of plastic films, composite films, sheets, and other materials used in packaging, medical and constructive industry.
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Water Vapor Permeability Analyzer
Guangzhou Biaoji Packaging Equipment Co., Ltd.
GBPI Water Vapor Permeability Analyzer used to test the water vapor transmission rate (WVTR) of packaging materials, such as plastic film, composite film, coextrusion film, aluminum-plated film, aluminum foil.
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Ion Beam Deposition
Create ultra-precise, high-purity, thin film layer devices with maximum uniformity and repeatability with Ion Beam Deposition (IBD) Systems.
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Water Vapor Desorption Products
RBD's vacuum chamber water vapor removal products include high-power, high temperature IR radiant bakeout emitters, and low-power, low temperature UVC emitters.
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Vapor Mass Flow Controllers
Heated pressure-based mass flow controllers are designed to meter and control vapor from low vapor pressure liquid and solid sources directly, without the need of a carrier gas.
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Particle Deposition Systems
Sets the standards for wafer inspection and metrology equipment. This advanced tool is vital for increasing the yield of future leading-edge devices, while meeting the measurement needs of today.
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Dynamic Vapor Sorption Analyzer
IGAsorp
The IGAsorp is a fully automated compact benchtop DVS analyzer, for fast and accurate vapor sorption measurements using the dynamic flow technique for water and organic solvents. Measured vapor uptake isotherms and kinetics are used to characterize, test and evaluate materials in precisely defined environmental conditions.
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Heat, Vapor, and Carbon-Dioxide Flux Sensors
Heat, vapor, and carbon-dioxide flux sensors are typically used in eddy-covariance systems to measure exchanges of carbon dioxide, water vapor, and heat between the surface of the earth and the atmosphere.
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Water Vapor Transmission Rate Tester
(Electrolysis Method)
Shandong Drick Instruments Co., Ltd.
DRK311 water vapor transmission rate tester (electrolytic method), the instrument is suitable for the determination of water vapor transmission rate of plastic films, composite films and other films and sheet materials. Through the measurement of water vapor transmission rate, the technical indicators of control and adjustment of packaging materials and other products can be achieved to meet the different needs of product applications.
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Cold Vapor Atomic Fluorescence (CVAF) Mercury Analyzer
QuickTrace M‑8000
The QuickTrace® M-8000 Cold Vapor Atomic Fluorescence (CVAF) mercury analyzer is ideal for ultra-trace to sub-mg/L mercury quantitation. Due to the high sensitivity of the M-8000, it easily achieves the ultra-trace detection limit of <0.05 ng/L total mercury that is demanded by customers following EPA method 1631. The QuickTrace® M-8000 is also versatile enough to analyze samples >400 µg/L without dilution in a research or industrial setting.
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Water Vapor Permeability Tester
QT-WVP
Qualitest Water Vapor Permeability Tester QT-WVP series is used to test the water vapor transmission rate (WVTR) of packaging materials.
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Vapor Pressure Tester
The MINIVAP laboratory and process vapor pressure analyzers are the worldwide accepted standard instruments for the determination of the vapor pressure of gasoline, crude oil and LPG.
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Dynamic Vapor Sorption Analyzer
IGAsorp-CT
The IGAsorp-CT is a fully automated dynamic vapor sorption analyzer for the measurement of water and organic solvent isotherms and kinetics on a wide range of materials. Operating at temperatures from 5 to 85 °C and humidity values from 0 to 98 %RH, the IGAsorp-CT offers the widest combined range of any DVS analyzer. An optional internal heater allows fully programmable pre-heating and thermal desorption measurements to 350 °C.
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Reid Vapor Pressure On-Line Analyzer
MiniVap On-Line RVP Analyzer
MINIVAP ON-LINE is a process monitoring analyzer for the determination of the vapor pressure of gasoline, crude oil, LPG and NPG. Also, the vapor-liquid ratio (LVR) of gasoline can be measured. The measuring principle is identical to the worldwide used laboratory instruments MINIVAP and therefore the MINIVAP ON-LINE produces equivalent results.
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Dynamic Vapor Sorption Analyzer
IGAsorp-XT
The IGAsorp-XT is a fully automated water sorption analyzer designed for measurements at temperatures and humidities beyond those available with conventional DVS analyzers. High resolution sorption isotherms are recorded at humidity values from 0.2 %RH or lower, using the unique climate-XT control method. Combined with high temperature water sorption measurements to 300 °C, an integrated pre-heater and completely flexible method programming, the IGAsorp-XT is the world’s most advanced benchtop DVS analyzer.
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2 MHz RF Plasma Generators
NOVA® Series
The NOVA ; RF Plasma Generators are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
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Reid Vapor Pressure Analyzers
Increase your gasoline blending profits with process Reid Vapor Pressure measurements and automatic air saturation of the sample.
